Singh K. Micro Electro Mechanical System Technology for Multifaceted Apps 2025

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Singh K. Micro Electro Mechanical System Technology for Multifaceted Apps 2025

Textbook in PDF format This book details simple methodology for the realization of the practical micro devices employed in general applications. The book brings out practical concept along with process details associated with the device realization. The micro device fabrication technique is similar to MEMS and the application and methodologies are compatible to standard CMOS technologies. This book covers basic of wafer, general micro devices such as micro-heater, temperature sensor, humidity sensor, gas sensor, pyro-device along with associated characterization, integration and assembly aspects. This book provides basic overview and discusses practical aspects with characterization data. This book is targeted for the beginners and researchers providing insight into the practical aspects of this technology. Micro-devices employing semiconductor fabrication techniques are gaining lot of interest due to compact structure and better performance. The ease of fabrication, miniaturization led to the popularity of these devices. These devices can be subset of MEMS but are not having mechanical membrane. The wide acceptance of these devices due to reduction in fabrication cost, size, and power consumption while maintaining better performance led to the widespread integration into various systems. Traditional and bulky mechanical sensors are widely employed in the automobile industry but microfabrication-based pressure sensors, accelerometers have already replaced the bulky sensors. Bulk production, enhanced performance and miniaturization make MEMS technology set apart from the traditional way. Micro-devices are basically offshoot of the MEMS circuits without movable membrane but employing the same fabrication techniques. Recently micromachined acoustic devices such as microphones and microspeakers are being fabricated and tested for applications such as hearing and cellular phone, micropersonal digital assistant (micro-PDA), earphone and microspeaker, etc. Since last decade attempts have been made for the development of acoustic microsensors by integrating a piezoelectric layer of zinc oxide (ZnO). The excellent piezoelectric and dielectric properties of zinc oxide (ZnO) make it an interesting material for investigation because of the potential advantage of its compatibility with microelectronics wet etching techniques, low cost, small volume array configuration. Basic wet chemistry employed in bulk micromachining for microcircuits realization but imposes process constraint as in CMOS fabline it is not allowed to and fro movement due to gate integrity issues resulting from highly mobile ions. The semiconductor technology grew in complexity with respect to number of gate counts, speed and functionality of circuits. This not only makes understanding of silicon in better way but also aggressively moved in the direction of integration of sensors with the CMOS.This book details simple methodology for the realization of the practical micro-devices employed in general applications. The book brings out practical concept along with process details associated with the device realization. The micro-device fabrication technique is similar to MEMS, and the application and methodologies are compatible to standard CMOS technologies