Vogel E. Thin Gate Oxide Reliability 2001
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Textbook in PDF format
Physics, Statistics and Models.
Voltage, Electric Field, Current and Energy.
Effects of Stress on Oxides and Devices.
Physical Models of Wear-Out and Breakdown.
Percolation and Statistics of Breakdown.
Relability, Characterization and Test Methodology.
Accelerated Stress Tests.
Relability Extrapolation.
Extrinsic Oxide Breakdown