Pelesko J. Modeling MEMS and NEMS 2003

Textbook in PDF format

Modeling MEMS and NEMS is about the construction, analysis, and interpretation of mathematical models of microelectromechanical and nanoelectromechanical systems (MEMS and NEMS). The study of these models is intended to illuminate microscale and nanoscale phenomena and to aid in the design and optimization of MEMS and NEMS devices. MEMS technology dates to 1964 with the production of the first batch fabricated MEMS device. The resonant gate transistor designed by H.C. Nathanson and his co-workers at Westinghouse, while large by today’s standards (1 mm on a side!), incorporated all of the features that characterize modern MEMS and NEMS structures. Right from the start these early MEMS pioneers realized the value of mathematical modeling. In fact, almost half of Nathanson’s seminal paper on the resonant gate transistor concerns modeling. This is a reflection of the fact that designing small structures necessitates an understanding of behavior a priori. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model. Modeling MEMS and NEMS contains the material needed by the MEMS/NEMS researcher building a mathematical model of their latest design. This text is intended for use by MEMS and NEMS professionals and by students studying science, engineering, or applied mathematicians who hope to become MEMS and NEMS researchers