Bao M. Analysis and Design Principles of MEMS Devices 2005

Textbook in PDF format

MEMS, the acronym of "Micro Electro Mechanical Systems", is generally considered as micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. As microelectronics is a well-developed technology, the research and development of MEMS is concentrated on the research and development of micro mechanical sensors and actuators, or micro mechanical transducers (Note that the word "transducer" is often used as a synonym of "sensor". However, it is sometimes read as "sensors and actuators". ). Or, we can say that micro mechanical sensors and actuators are the basic devices for MEMS. Therefore, this book studies the analysis and design principles of the basic devices used to construct MEMS, the micro mechanical sensors and actuators (or the micro mechanical transducers)