Sze S. VLSI technology 1983

Textbook in PDF format

VLSI Technology describes the theoretical and practical aspects of the most advanced state of electronics technology—very-large-scale integration (VLSI). From crystal growth to reliability testing, the reader is presented with all the major steps in the fabrication of VLSI circuits. In addition many broader topics, such as process simulation and diagnostic techniques, are considered in detail. Each chapter describes one aspect of VLSI processing. The chapter's introduction provides a general discussion of the topic, and subsequent sections present the basic science underlying individual process steps, the necessity for particular steps in achieving required parameters, and the trade-offs in optimizing device performance and manufacturability. The problems at the end of each chapter form an integral part of the development of the topic