Adams T. Introductory MEMS. Fabrication and Applications 2010

Textbook in PDF format

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.
Fabrication
Introduction
The substrate and adding material to it
Creating and transferring patterns—Photolithography
Creating structures—Micromachining
Solid mechanics
Applications
Thinking about modeling
MEMS transducers—An overview of how they work
Piezoresistive transducers
Capacitive transducers
Piezoelectric transducers
Thermal transducers
Introduction to microfluidics
Microfabrication laboratories
Microfabrication laboratories
Experiments
Appendixes
Notation
Periodic table of the elements
The complimentary error function
Color chart for thermally grown silicon dioxide