Kao I. Wafer Manufacturing...Single Crystal Silicon Wafers 2021

Textbook in PDF format

Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
From Crystal to Prime Wafers
Wafers and Semiconductors
Wafer Manufacturing: Generalized Processes and Flow
Process Modeling and Manufacturing Processes
Wafer Forming
Wafer Slicing Using a Modern Slurry Wiresaw and Other Saws
Modeling of the Wiresaw Manufacturing Process and Material Characteristics
Diamond-Impregnated Wire Saws and the Sawing Process
Wafer Surface Preparation and Management
Lapping
Chemical Mechanical Polishing
Grinding, Edge Grinding, Etching, and Surface Cleaning
Wafer Metrology and Optical Techniques
Conclusion