Baltes H. CMOS - MEMS 2005

Textbook in PDF format

The present volume of Advanced Micro & Nanosystems has been divided into eleven chapters, providing a broad overview on current and past activities in the area of CMOS-MEMS. To our best knowledge, it is the first book dedicated to CMOS-MEMS. It examines and illustrates the recent, significant advances in the field of CMOS-integrated microelectromechanical systems. With all of the series editors having a background in using CMOS processes for microsystem development, a book like this has been on our minds for quite some time. Covering recent advances from the world of micro and nanosystems, future AMN issues will either focus on a particular subject, such as the present CMOSMEMS, or be a carefully chosen set of cutting-edge overview and review articles like the first AMN volume on Enabling Techniques for MEMS and Nanodevices